Evaluation of 4H-SiC Carbon Face Gate Oxide Reliability

Fronheiser, J.A. / Chatterjee, A. / Grossner, U. et al. | British Library Online Contents | 2011

Impact of Oxidation Conditions and Surface Defects on the Reliability of Large-Area Gate Oxide on the C-Face of 4H-SiC

Hatakeyama, T. / Suzuki, T. / Ichinoseki, K. et al. | British Library Online Contents | 2010

Impact of Carbon Cap Annealing on Gate Oxide Reliability on 4H-SiC (000-1) C-Face

Harada, S. / Kato, M. / Ito, S. et al. | British Library Online Contents | 2009

Gate-Area Dependence of SiC Thermal Oxides Reliability

Senzaki, J. / Shimozato, A. / Okamoto, M. et al. | British Library Online Contents | 2009

Gate-Area Dependence of SiC Thermal Oxides Reliability

Senzaki, J. / Shimozato, A. / Okamoto, M. et al. | British Library Online Contents | 2009