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Impact of Oxidation Conditions and Surface Defects on the Reliability of Large-Area Gate Oxide on the C-Face of 4H-SiC
Impact of Oxidation Conditions and Surface Defects on the Reliability of Large-Area Gate Oxide on the C-Face of 4H-SiC
Impact of Oxidation Conditions and Surface Defects on the Reliability of Large-Area Gate Oxide on the C-Face of 4H-SiC
Hatakeyama, T. (Autor:in) / Suzuki, T. (Autor:in) / Ichinoseki, K. (Autor:in) / Matsuhata, H. (Autor:in) / Fukuda, K. (Autor:in) / Shinohe, T. (Autor:in) / Arai, K. (Autor:in) / Bauer, A.J. / Friedrichs, P. / Krieger, M.
01.01.2010
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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