Reliability of Large-Area Gate Oxide on the C-Face of 4H-SiC: Fid-Bau Portal

Reliability of Large-Area Gate Oxide on the C-Face of 4H-SiC

Hatakeyama, T. / Kono, H. / Suzuki, T. / Senzaki, J. / Fukuda, K. / Shinohe, T. / Arai, K.

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Reliability of Large-Area Gate Oxide on the C-Face of 4H-SiC

Hatakeyama, T. / Kono, H. / Suzuki, T. / Senzaki, J. / Fukuda, K. / Shinohe, T. / Arai, K.

Reliability of Large-Area Gate Oxide on the C-Face of 4H-SiC

Hatakeyama, T. / Kono, H. / Suzuki, T. / Senzaki, J. / Fukuda, K. / Shinohe, T. / Arai, K.

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Title:

Reliability of Large-Area Gate Oxide on the C-Face of 4H-SiC

Contributors:

Hatakeyama, T. (author) / Kono, H. (author) / Suzuki, T. (author) / Senzaki, J. (author) / Fukuda, K. (author) / Shinohe, T. (author) / Arai, K. (author)

Published in:

MATERIALS SCIENCE FORUM ; 615/617 ; 553-556

Publication date:

2009-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Fronheiser, J.A. / Chatterjee, A. / Grossner, U. et al. | British Library Online Contents | 2011

Impact of Oxidation Conditions and Surface Defects on the Reliability of Large-Area Gate Oxide on the C-Face of 4H-SiC

Hatakeyama, T. / Suzuki, T. / Ichinoseki, K. et al. | British Library Online Contents | 2010

Impact of Carbon Cap Annealing on Gate Oxide Reliability on 4H-SiC (000-1) C-Face

Harada, S. / Kato, M. / Ito, S. et al. | British Library Online Contents | 2009

Gate-Area Dependence of SiC Thermal Oxides Reliability

Senzaki, J. / Shimozato, A. / Okamoto, M. et al. | British Library Online Contents | 2009

Gate-Area Dependence of SiC Thermal Oxides Reliability

Senzaki, J. / Shimozato, A. / Okamoto, M. et al. | British Library Online Contents | 2009