Thinning of SiC Wafer by Plasma Chemical Vaporization Machining

Sano, Y. / Kato, T. / Hori, T. et al. | British Library Online Contents | 2010

Beveling of Silicon Carbide Wafer by Plasma Chemical Vaporization Machining

Kato, T. / Sano, Y. / Hara, H. et al. | British Library Online Contents | 2009

Beveling of Silicon Carbide Wafer by Plasma Chemical Vaporization Machining

Kato, T. / Sano, Y. / Hara, H. et al. | British Library Online Contents | 2009

Thinning of 2-Inch SiC Wafer by Plasma Chemical Vaporization Machining Using Cylindrical Rotary Electrode

Sano, Y. / Kato, T. / Aida, K. et al. | British Library Online Contents | 2011

High-Efficient Damage-Free Correction of the Thickness Distribution of Quartz Crystal Wafer Using Open-Air Type Plasma CVM

Yamamura, K. / Morikawa, T. / Ueda, M. | British Library Online Contents | 2009