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    Effect of Substrate Heating in Thickness Correction of Quartz Crystal Wafer by Plasma Chemical Vaporization Machining

    New search for: Ueda, M.
    New search for: Shibahara, M.
    New search for: Zettsu, N.
    New search for: Yamamura, K.
    New search for: Zhao, J.
    New search for: Kunieda, M.
    New search for: Yang, G.
    New search for: Yuan, X.-M.

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    Effect of Substrate Heating in Thickness Correction of Quartz Crystal Wafer by Plasma Chemical Vaporization Machining

    New search for: Ueda, M.
    New search for: Shibahara, M.
    New search for: Zettsu, N.
    New search for: Yamamura, K.
    New search for: Zhao, J.
    New search for: Kunieda, M.
    New search for: Yang, G.
    New search for: Yuan, X.-M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Effect of Substrate Heating in Thickness Correction of Quartz Crystal Wafer by Plasma Chemical Vaporization Machining

    New search for: Ueda, M.
    New search for: Shibahara, M.
    New search for: Zettsu, N.
    New search for: Yamamura, K.
    New search for: Zhao, J.
    New search for: Kunieda, M.
    New search for: Yang, G.
    New search for: Yuan, X.-M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

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    Document information
    Title:

    Effect of Substrate Heating in Thickness Correction of Quartz Crystal Wafer by Plasma Chemical Vaporization Machining

    Contributors:

    Ueda, M. (author) / Shibahara, M. (author) / Zettsu, N. (author) / Yamamura, K. (author) / Zhao, J. / Kunieda, M. / Yang, G. / Yuan, X.-M.

    Published in:

    Advances in Precision Engineering ; 218-222

    KEY ENGINEERING MATERIALS ; 447/448

    Publication date:

    2010-01-01

    Size:

    5 pages

    ISSN:

    1013-9826

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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