Annealing effects of tantalum thin films sputtered on [001] silicon substrate

Liu, L. / Gong, H. / Wang, Y. et al. | British Library Online Contents | 2001

X-Ray Measurement of Residual Stress Distribution in Sputtered Cu Thin Films

Akiniwa, Y. / Sakaue, T. | British Library Online Contents | 2012

Mechanical property development in reactively sputtered tantalum carbide/amorphous hydrocarbon thin films

Evans, R. D. / Doll, G. L. / Glass, J. T. | British Library Online Contents | 2006

Residual Stress in Thin Films of RF-Sputtered Aluminum by X-Ray Multiaxial Stress Measurement

Ejiri, S. / Lin, Z. / Sasaki, T. et al. | British Library Online Contents | 1997

Residual Stress Evaluation of Thin Film Using Strip Bending Test

Kim, J. H. / Lee, H. J. / Han, S. W. et al. | British Library Online Contents | 2006