Characteristics of germanium dry etching using inductively coupled SF"6 plasma

Shim, K. H. / Kil, Y. H. / Yang, H. D. et al. | British Library Online Contents | 2012

Reactive ion etching of FePt using inductively coupled plasma

Kanazawa, T. / Ono, K. / Takenaka, M. et al. | British Library Online Contents | 2008

Optimization of inductively coupled plasma deep etching of GaN and etching damage analysis

Qiu, R. / Lu, H. / Chen, D. et al. | British Library Online Contents | 2011

Inductively coupled plasma etching of GaN using Cl2/He gases

Lin, Y. C. / Chang, S. J. / Su, Y. K. et al. | British Library Online Contents | 2003

Etching of platinum thin films in an inductively coupled plasma

Wuu, D. S. / Kuo, N. H. / Liao, F. C. et al. | British Library Online Contents | 2001