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Composition dependent interfacial thermal stability, band alignment and electrical properties of Hf1-xTixO2/Si gate stacks
Composition dependent interfacial thermal stability, band alignment and electrical properties of Hf1-xTixO2/Si gate stacks
Composition dependent interfacial thermal stability, band alignment and electrical properties of Hf1-xTixO2/Si gate stacks
APPLIED SURFACE SCIENCE ; 346 ; 489-496
01.01.2015
8 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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