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Passivation of Ge surface treated with trimethylaluminum and investigation of electrical properties of HfTiO/Ge gate stacks
Passivation of Ge surface treated with trimethylaluminum and investigation of electrical properties of HfTiO/Ge gate stacks
Passivation of Ge surface treated with trimethylaluminum and investigation of electrical properties of HfTiO/Ge gate stacks
Gao, Juan (Autor:in) / He, Gang (Autor:in) / Xiao, Dongqi (Autor:in) / Jin, Peng (Autor:in) / Jiang, Shanshan (Autor:in) / Li, Wendong (Autor:in) / Liang, Shuang (Autor:in) / Zhu, Li (Autor:in)
Journal of materials science & technology ; 33 ; 901-906
01.01.2017
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.1105
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