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Passivation of Ge surface treated with trimethylaluminum and investigation of electrical properties of HfTiO/Ge gate stacks
Passivation of Ge surface treated with trimethylaluminum and investigation of electrical properties of HfTiO/Ge gate stacks
Passivation of Ge surface treated with trimethylaluminum and investigation of electrical properties of HfTiO/Ge gate stacks
Gao, Juan (author) / He, Gang (author) / Xiao, Dongqi (author) / Jin, Peng (author) / Jiang, Shanshan (author) / Li, Wendong (author) / Liang, Shuang (author) / Zhu, Li (author)
Journal of materials science & technology ; 33 ; 901-906
2017-01-01
6 pages
Article (Journal)
English
DDC:
620.1105
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