Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Preparation method for preparing IGZO rotating target material through gel casting
The invention provides a preparation method for preparing an IGZO rotating target material through gel casting, which comprises the following steps: 1) weighing In2O3, Ga2O3 and ZnO powder to prepare mixed powder, respectively adding deionized water, a functional group monomer, a dispersing agent, an initiator and a catalyst into a mixing device, and carrying out wet ball milling, mixing and uniform stirring to form slurry; 2) injecting the slurry into a mold through an injection molding machine, and curing and drying to obtain an IGZO target material blank; (3) placing the dried IGZO target material blank in a degreasing furnace to be degreased; (4) placing the degreased IGZO target material blankin a high-temperature sintering furnace to be sintered; (5) machining the sintered IGZO target material blank; and (6) bonding the machined IGZO target material blank to a stainless steel pipe through a bonding material, and obtaining the IGZO rotating target material. According to the method, the defect that in the prior art, due to powder slurry casting forming, the IGZO target blank is uneven in density gradient and prone to deformation is overcome, and the purpose of efficiently preparing the IGZO rotating target is achieved.
本发明提供一种凝胶注模制备IGZO旋转靶材的制备方法，包括以下步骤：1)、称取In2O3、Ga2O3、ZnO粉末配备成混合粉体，将去离子水、官能团单体、分散剂、引发剂以及催化剂，分别加入到混合装置内进行湿法球磨混合搅拌均匀形成浆料；2)、将浆料通过注塑机注入模具固化干燥得到IGZO靶材毛坯；3)、将干燥的IGZO靶材毛坯放置于脱脂炉内脱脂；4)、将脱脂后的IGZO靶材毛坯放置于高温烧结炉内烧结；5)、将烧结后的IGZO靶材毛坯进行机械加工；6)、将加工后的IGZO靶材毛坯通过邦定材料邦定在不锈钢管上，得到IGZO旋转靶材。本发明避免了现有技术中因粉浆浇注成型而导致IGZO靶材毛坯密度梯度不均匀易变形的缺陷，达到高效制备IGZO旋转靶材的目的。
Preparation method for preparing IGZO rotating target material through gel casting
The invention provides a preparation method for preparing an IGZO rotating target material through gel casting, which comprises the following steps: 1) weighing In2O3, Ga2O3 and ZnO powder to prepare mixed powder, respectively adding deionized water, a functional group monomer, a dispersing agent, an initiator and a catalyst into a mixing device, and carrying out wet ball milling, mixing and uniform stirring to form slurry; 2) injecting the slurry into a mold through an injection molding machine, and curing and drying to obtain an IGZO target material blank; (3) placing the dried IGZO target material blank in a degreasing furnace to be degreased; (4) placing the degreased IGZO target material blankin a high-temperature sintering furnace to be sintered; (5) machining the sintered IGZO target material blank; and (6) bonding the machined IGZO target material blank to a stainless steel pipe through a bonding material, and obtaining the IGZO rotating target material. According to the method, the defect that in the prior art, due to powder slurry casting forming, the IGZO target blank is uneven in density gradient and prone to deformation is overcome, and the purpose of efficiently preparing the IGZO rotating target is achieved.
本发明提供一种凝胶注模制备IGZO旋转靶材的制备方法，包括以下步骤：1)、称取In2O3、Ga2O3、ZnO粉末配备成混合粉体，将去离子水、官能团单体、分散剂、引发剂以及催化剂，分别加入到混合装置内进行湿法球磨混合搅拌均匀形成浆料；2)、将浆料通过注塑机注入模具固化干燥得到IGZO靶材毛坯；3)、将干燥的IGZO靶材毛坯放置于脱脂炉内脱脂；4)、将脱脂后的IGZO靶材毛坯放置于高温烧结炉内烧结；5)、将烧结后的IGZO靶材毛坯进行机械加工；6)、将加工后的IGZO靶材毛坯通过邦定材料邦定在不锈钢管上，得到IGZO旋转靶材。本发明避免了现有技术中因粉浆浇注成型而导致IGZO靶材毛坯密度梯度不均匀易变形的缺陷，达到高效制备IGZO旋转靶材的目的。
Preparation method for preparing IGZO rotating target material through gel casting
一种凝胶注模制备IGZO旋转靶材的制备方法
KONG WEIHUA (Autor:in)
07.09.2021
Patent
Elektronische Ressource
Chinesisch
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