Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Nb-doped tantalum-containing tin oxide target material and preparation method thereof
The invention provides an Nb-doped tantalum-containing tin oxide target material and a preparation method thereof, and belongs to the technical field of target material manufacturing, the preparation method comprises the following steps: S1, uniformly mixing tin oxide powder, tantalum oxide powder and niobium oxide powder in water to obtain slurry with the solid content of 40-80%; s2, adding a polyethylene carboxylic acid dispersing agent into the slurry, stirring for 25-35 minutes, sanding, adding a polyvinyl alcohol binder, dispersing for 25-35 minutes, and performing spray granulation to prepare powder; s3, the powder obtained in the step S2 is subjected to cold press molding, and a cold-pressed biscuit is obtained; s4, the cold-pressed biscuit is subjected to cold isostatic pressing forming, and a cold isostatic pressing biscuit is obtained; and S5, the cold isostatic pressing biscuit is sequentially subjected to degreasing sintering and surface machining treatment, and the tantalum-containing tin oxide target material is obtained. The Nb-doped tantalum-containing tin oxide target material which is uniform in grain size, low in bulk resistivity and high in density can be obtained.
本发明给出了一种掺Nb的含钽氧化锡靶材及其制备方法，属于靶材制造技术领域，该制备方法包括：步骤S1、将氧化锡粉末、氧化钽粉末和氧化铌粉末在水中混合均匀，得到固含量为40～80％的浆料；步骤S2、将聚乙烯羧酸分散剂加入所述浆料后，搅拌25～35分钟，然后砂磨处理，再加入聚乙烯醇粘结剂，分散25～35分钟后，喷雾造粒制粉；步骤S3、将步骤S2中所得的粉末冷压成型，得到冷压素坯；步骤S4、将冷压素坯冷等静压成型，得到冷等静压素坯；步骤S5、对冷等静压素坯依次进行脱脂烧结和表面加工处理，得到含钽氧化锡靶材。本发明能够得到晶粒尺寸均匀、体电阻率低、且密度高的Nb掺杂的含钽氧化锡靶材。
Nb-doped tantalum-containing tin oxide target material and preparation method thereof
The invention provides an Nb-doped tantalum-containing tin oxide target material and a preparation method thereof, and belongs to the technical field of target material manufacturing, the preparation method comprises the following steps: S1, uniformly mixing tin oxide powder, tantalum oxide powder and niobium oxide powder in water to obtain slurry with the solid content of 40-80%; s2, adding a polyethylene carboxylic acid dispersing agent into the slurry, stirring for 25-35 minutes, sanding, adding a polyvinyl alcohol binder, dispersing for 25-35 minutes, and performing spray granulation to prepare powder; s3, the powder obtained in the step S2 is subjected to cold press molding, and a cold-pressed biscuit is obtained; s4, the cold-pressed biscuit is subjected to cold isostatic pressing forming, and a cold isostatic pressing biscuit is obtained; and S5, the cold isostatic pressing biscuit is sequentially subjected to degreasing sintering and surface machining treatment, and the tantalum-containing tin oxide target material is obtained. The Nb-doped tantalum-containing tin oxide target material which is uniform in grain size, low in bulk resistivity and high in density can be obtained.
本发明给出了一种掺Nb的含钽氧化锡靶材及其制备方法，属于靶材制造技术领域，该制备方法包括：步骤S1、将氧化锡粉末、氧化钽粉末和氧化铌粉末在水中混合均匀，得到固含量为40～80％的浆料；步骤S2、将聚乙烯羧酸分散剂加入所述浆料后，搅拌25～35分钟，然后砂磨处理，再加入聚乙烯醇粘结剂，分散25～35分钟后，喷雾造粒制粉；步骤S3、将步骤S2中所得的粉末冷压成型，得到冷压素坯；步骤S4、将冷压素坯冷等静压成型，得到冷等静压素坯；步骤S5、对冷等静压素坯依次进行脱脂烧结和表面加工处理，得到含钽氧化锡靶材。本发明能够得到晶粒尺寸均匀、体电阻率低、且密度高的Nb掺杂的含钽氧化锡靶材。
Nb-doped tantalum-containing tin oxide target material and preparation method thereof
一种掺Nb的含钽氧化锡靶材及其制备方法
MENG JIANG (Autor:in) / ZHENG WEIXING (Autor:in) / LUO WEN (Autor:in) / ZUO NINGWEI (Autor:in) / HU QIANGNAN (Autor:in) / LI ZHENGFEI (Autor:in) / WANG HUAN (Autor:in) / ZHANG ZIFU (Autor:in) / ZHANG SHUAI (Autor:in) / YANG LONG (Autor:in)
19.12.2023
Patent
Elektronische Ressource
Chinesisch
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