Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
High-density magnesium oxide target material as well as preparation method and application thereof
The invention provides a high-density magnesium oxide target material as well as a preparation method and application thereof, and belongs to the technical field of new material manufacturing and application. The preparation method comprises the following steps: mixing a magnesium source powder raw material, a solvent and a functional additive, and sanding to obtain slurry; then, the slurry is subjected to pressure grouting and pressure maintaining, and a target biscuit is obtained; and finally, the target material biscuit is sequentially subjected to drying treatment, degreasing and sintering, and the high-density magnesium oxide ceramic target material is obtained. In the preparation process, a sintering aid is not used, a hot pressing method is not adopted, the problem of insufficient purity caused by the sintering aid and carbon pollution is solved, meanwhile, the preparation process is simplified by combining the degreasing step and the sintering step, the cost and the operation difficulty can be reduced by performing under normal pressure, and the method is suitable for industrial production.
本发明提供了一种高致密氧化镁靶材及其制备方法和应用，属于新材料制造及应用技术领域。本发明通过将镁源粉体原料、溶剂、功能助剂混合后砂磨得到浆料；然后将浆料通过压力注浆、保压得到靶材素坯；最后将靶材素坯依次经过干燥处理、脱脂烧结得到高致密氧化镁陶瓷靶材。在制备过程中不使用烧结助剂、不采用热压方法，没有烧结助剂和碳污染导致的纯度不足问题，同时脱脂和烧结步骤相结合简化了制备过程，在常压下进行即可降低了成本和操作难度，适用于工业生产。
High-density magnesium oxide target material as well as preparation method and application thereof
The invention provides a high-density magnesium oxide target material as well as a preparation method and application thereof, and belongs to the technical field of new material manufacturing and application. The preparation method comprises the following steps: mixing a magnesium source powder raw material, a solvent and a functional additive, and sanding to obtain slurry; then, the slurry is subjected to pressure grouting and pressure maintaining, and a target biscuit is obtained; and finally, the target material biscuit is sequentially subjected to drying treatment, degreasing and sintering, and the high-density magnesium oxide ceramic target material is obtained. In the preparation process, a sintering aid is not used, a hot pressing method is not adopted, the problem of insufficient purity caused by the sintering aid and carbon pollution is solved, meanwhile, the preparation process is simplified by combining the degreasing step and the sintering step, the cost and the operation difficulty can be reduced by performing under normal pressure, and the method is suitable for industrial production.
本发明提供了一种高致密氧化镁靶材及其制备方法和应用，属于新材料制造及应用技术领域。本发明通过将镁源粉体原料、溶剂、功能助剂混合后砂磨得到浆料；然后将浆料通过压力注浆、保压得到靶材素坯；最后将靶材素坯依次经过干燥处理、脱脂烧结得到高致密氧化镁陶瓷靶材。在制备过程中不使用烧结助剂、不采用热压方法，没有烧结助剂和碳污染导致的纯度不足问题，同时脱脂和烧结步骤相结合简化了制备过程，在常压下进行即可降低了成本和操作难度，适用于工业生产。
High-density magnesium oxide target material as well as preparation method and application thereof
一种高致密氧化镁靶材及其制备方法和应用
LIU MIAO (Autor:in) / SUN BENSHUANG (Autor:in) / LIU YANG (Autor:in) / HE JILIN (Autor:in) / QIAN ZHIJIE (Autor:in) / CHEN JIE (Autor:in) / ZENG XUEYUN (Autor:in) / WANG ZHIJUN (Autor:in)
20.09.2024
Patent
Elektronische Ressource
Chinesisch
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