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Tin oxide-based evaporation target material as well as preparation method and application thereof
The invention relates to the field of perovskite battery application target materials, and particularly discloses a tin oxide-based evaporation target material, a preparation method and application of the tin oxide-based evaporation target material. The tin oxide-based evaporation target material comprises tin oxide and an oxide, the preparation method comprises the following steps: performing alcoholysis and hydrolysis on tin oxide and oxide, and calcining to obtain tin oxide powder; grinding tin oxide powder, adding a binder and a plasticizer, and carrying out spray drying to obtain mixed powder; carrying out molding treatment on the mixed powder to obtain a plain blank; degreasing the blank, heating and sintering, and cooling to room temperature to obtain a pre-sintered target material; crushing the pre-sintered target material, grinding, adding a binder and a plasticizer, stirring, filtering, and carrying out spray drying to obtain composite powder; molding the composite powder to obtain a semi-finished product; performing degreasing and high-pressure sintering on the semi-finished product, and cooling to room temperature to obtain a finished product target material; the method is used for preparing tin oxide films. The evaporation target material has good density and high electron transmission efficiency, and has high conductivity and light transmittance after being prepared into a thin film.
本申请涉及钙钛矿电池应用靶材领域,具体公开了一种氧化锡基蒸镀靶材、制备方法及其应用;一种氧化锡基蒸镀靶材,包含氧化锡和氧化物;其制备方法为:将氧化锡和氧化物醇解、水解后煅烧,得到氧化锡粉末;氧化锡粉末研磨后添加粘结剂和增塑剂,经喷雾干燥后得混合粉体;混合粉体经成型处理得素胚;素胚脱脂处理,升温烧结,降至室温,得预烧靶材;将预烧靶材进行破碎,然后经研磨,添加粘结剂和增塑剂搅拌过滤,经喷雾干燥,制得复合粉体;复合粉体成型处理,得半成品;半成品进行脱脂、高压烧结、降至室温,得到成品靶材;应用于制备氧化锡薄膜;蒸镀靶材具有较好密度的同时电子传输效率高,制成薄膜后,具有较高的导电性和透光率。
Tin oxide-based evaporation target material as well as preparation method and application thereof
The invention relates to the field of perovskite battery application target materials, and particularly discloses a tin oxide-based evaporation target material, a preparation method and application of the tin oxide-based evaporation target material. The tin oxide-based evaporation target material comprises tin oxide and an oxide, the preparation method comprises the following steps: performing alcoholysis and hydrolysis on tin oxide and oxide, and calcining to obtain tin oxide powder; grinding tin oxide powder, adding a binder and a plasticizer, and carrying out spray drying to obtain mixed powder; carrying out molding treatment on the mixed powder to obtain a plain blank; degreasing the blank, heating and sintering, and cooling to room temperature to obtain a pre-sintered target material; crushing the pre-sintered target material, grinding, adding a binder and a plasticizer, stirring, filtering, and carrying out spray drying to obtain composite powder; molding the composite powder to obtain a semi-finished product; performing degreasing and high-pressure sintering on the semi-finished product, and cooling to room temperature to obtain a finished product target material; the method is used for preparing tin oxide films. The evaporation target material has good density and high electron transmission efficiency, and has high conductivity and light transmittance after being prepared into a thin film.
本申请涉及钙钛矿电池应用靶材领域,具体公开了一种氧化锡基蒸镀靶材、制备方法及其应用;一种氧化锡基蒸镀靶材,包含氧化锡和氧化物;其制备方法为:将氧化锡和氧化物醇解、水解后煅烧,得到氧化锡粉末;氧化锡粉末研磨后添加粘结剂和增塑剂,经喷雾干燥后得混合粉体;混合粉体经成型处理得素胚;素胚脱脂处理,升温烧结,降至室温,得预烧靶材;将预烧靶材进行破碎,然后经研磨,添加粘结剂和增塑剂搅拌过滤,经喷雾干燥,制得复合粉体;复合粉体成型处理,得半成品;半成品进行脱脂、高压烧结、降至室温,得到成品靶材;应用于制备氧化锡薄膜;蒸镀靶材具有较好密度的同时电子传输效率高,制成薄膜后,具有较高的导电性和透光率。
Tin oxide-based evaporation target material as well as preparation method and application thereof
一种氧化锡基蒸镀靶材、制备方法及其应用
CHEN LU (Autor:in) / GE CHUNQIAO (Autor:in) / LI QIANG (Autor:in) / ZHONG WEIPING (Autor:in) / LIANG QIYING (Autor:in) / GAO YUHANG (Autor:in) / LUO ZEYU (Autor:in)
12.04.2024
Patent
Elektronische Ressource
Chinesisch
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