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Accurate infrared spectroscopy analysis in back-side damaged silicon wafers

Garrido, B. / Moreno, J. A. / Samitier, J. / Morante, J. R.

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Accurate infrared spectroscopy analysis in back-side damaged silicon wafers

Garrido, B. / Moreno, J. A. / Samitier, J. / Morante, J. R.

Accurate infrared spectroscopy analysis in back-side damaged silicon wafers

Garrido, B. / Moreno, J. A. / Samitier, J. / Morante, J. R.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Accurate infrared spectroscopy analysis in back-side damaged silicon wafers

Contributors:

Garrido, B. (author) / Moreno, J. A. (author) / Samitier, J. (author) / Morante, J. R. (author)

Published in:

APPLIED SURFACE SCIENCE ; 63 ; 236

Publication date:

1993-01-01

Size:

236 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 621.35

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