Heavily Arsenic Doping into Si by ArF Excimer Laser Irradiation using Tertiarybutylarsine (tBAs): Fid-Bau Portal

Heavily Arsenic Doping into Si by ArF Excimer Laser Irradiation using Tertiarybutylarsine (tBAs)

Chichibu, S. / Nii, T. / Akane, T. / Matsumoto, S.

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Heavily Arsenic Doping into Si by ArF Excimer Laser Irradiation using Tertiarybutylarsine (tBAs)

Chichibu, S. / Nii, T. / Akane, T. / Matsumoto, S.

Heavily Arsenic Doping into Si by ArF Excimer Laser Irradiation using Tertiarybutylarsine (tBAs)

Chichibu, S. / Nii, T. / Akane, T. / Matsumoto, S.

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Document information

Title:

Heavily Arsenic Doping into Si by ArF Excimer Laser Irradiation using Tertiarybutylarsine (tBAs)

Contributors:

Chichibu, S. (author) / Nii, T. (author) / Akane, T. (author) / Matsumoto, S. (author) / Taguchi, T.

Published in:

Shallow Impurities in Semiconductors ; 243

MATERIALS SCIENCE FORUM

Publication date:

1993-01-01

Size:

243 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 620.11

Cui, J. / Ozeki, M. / Ohashi, M. | British Library Online Contents | 1997

Monoenergetic Positron Beam Study of Heavily Si-doped GaAs Grown by MOCVD using Tertiarybutylarsine

Chichibu, S. / Iwai, A. / Nakahara, Y. et al. | British Library Online Contents | 1993

Excimer laser doping techniques for II-VI semiconductors

Hatanaka, Y. / Niraula, M. / Nakamura, A. et al. | British Library Online Contents | 2001

Characterization of Excimer Laser Annealing of Arsenic Implanted Silicon

Akane, T. / Mastumoto, S. / Mizushima, I. | British Library Online Contents | 1993

Excimer-laser doping of spin-on dopant in silicon

Wong, Y. W. / Yang, X. Q. / Chan, P. W. et al. | British Library Online Contents | 1993