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A new metal-organic chemical vapor deposition process for selective copper metallization

Norman, J. A. T. / Muratore, B. A. / Dyer, P. N. / Roberts, D. A.

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A new metal-organic chemical vapor deposition process for selective copper metallization

Norman, J. A. T. / Muratore, B. A. / Dyer, P. N. / Roberts, D. A.

A new metal-organic chemical vapor deposition process for selective copper metallization

Norman, J. A. T. / Muratore, B. A. / Dyer, P. N. / Roberts, D. A.

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Order at Subito €

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Document information

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Document information

Title:

A new metal-organic chemical vapor deposition process for selective copper metallization

Contributors:

Norman, J. A. T. (author) / Muratore, B. A. (author) / Dyer, P. N. (author) / Roberts, D. A. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 17 ; 87

Publication date:

1993-01-01

Size:

87 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 620.11

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