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Electronic promotion of silicon oxynitridation at room temperature by alkali-metal catalysts

Glachant, A. / Soukiassian, P. / Kim, S. T. / Hurych, Z.

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Electronic promotion of silicon oxynitridation at room temperature by alkali-metal catalysts

Glachant, A. / Soukiassian, P. / Kim, S. T. / Hurych, Z.

Electronic promotion of silicon oxynitridation at room temperature by alkali-metal catalysts

Glachant, A. / Soukiassian, P. / Kim, S. T. / Hurych, Z.

Access

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Electronic promotion of silicon oxynitridation at room temperature by alkali-metal catalysts

Contributors:

Glachant, A. (author) / Soukiassian, P. (author) / Kim, S. T. (author) / Hurych, Z. (author)

Published in:

APPLIED SURFACE SCIENCE ; 65//66 ; 847

Publication date:

1993-01-01

Size:

847 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 621.35

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