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Deformation mechanisms of Al films on oxidized Si wafers

Volkert, C. A. / Alofs, C. F. / Liefting, J. R.

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Deformation mechanisms of Al films on oxidized Si wafers

Volkert, C. A. / Alofs, C. F. / Liefting, J. R.

Deformation mechanisms of Al films on oxidized Si wafers

Volkert, C. A. / Alofs, C. F. / Liefting, J. R.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Deformation mechanisms of Al films on oxidized Si wafers

Contributors:

Volkert, C. A. (author) / Alofs, C. F. (author) / Liefting, J. R. (author)

Published in:

JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 9 ; 1147

Publication date:

1994-01-01

Size:

1147 pages

ISSN:

0884-2914

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 620.11

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