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Hybrid-excitation chemical vapor deposition of a silicon nitride film

Yamamoto, S. / Migitaka, M.

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Hybrid-excitation chemical vapor deposition of a silicon nitride film

Yamamoto, S. / Migitaka, M.

Hybrid-excitation chemical vapor deposition of a silicon nitride film

Yamamoto, S. / Migitaka, M.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Hybrid-excitation chemical vapor deposition of a silicon nitride film

Contributors:

Yamamoto, S. (author) / Migitaka, M. (author)

Published in:

APPLIED SURFACE SCIENCE ; 79/80 ; 344

Publication date:

1994-01-01

Size:

344 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 621.35

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