Selective epitaxial Si based layers and TiSi~2 deposition by integrated chemical vapor deposition

Regolini, J. L. / Margail, J. / Bodnar, S. et al. | British Library Online Contents | 1996

Surface studies of SiC epitaxial layers grown by chemical vapor deposition

Kodigala, S. R. / Bhat, I. / Chow, T. P. et al. | British Library Online Contents | 2006

Growth of Thick Epitaxial 4H-SiC Layers by Chemical Vapor Deposition

Kordina, O. / Irvine, K. / Sumakeris, J. et al. | British Library Online Contents | 1998

A comparative study of TiSi~2 obtained by solid-state reaction and chemical vapor deposition

Gouy-Pailler, P. / Haond, M. / Mathiot, D. et al. | British Library Online Contents | 1993

Growth of high quality epitaxial Si1-x-yGexCy layers by using chemical vapor deposition

Hallstedt, J. / Suvar, E. / Persson, P. O. et al. | British Library Online Contents | 2004