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Hybrid LCVD of micro-metallic lines for TFT-LCD circuit repair
Hybrid LCVD of micro-metallic lines for TFT-LCD circuit repair
Hybrid LCVD of micro-metallic lines for TFT-LCD circuit repair
Park, J. B. (author) / Kim, C. J. (author) / Shin, P. E. (author) / Park, S. H. (author) / Kang, H. S. (author) / Jeong, S. H. (author)
APPLIED SURFACE SCIENCE ; 253 ; 1029-1035
2006-01-01
7 pages
Article (Journal)
English
DDC:
621.35
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