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Fabrication of ultrathin silicon dioxide layers in ultra high vacuum

Majamaa, T. / Airaksinen, V.-M. / Sinkkonen, J.

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Fabrication of ultrathin silicon dioxide layers in ultra high vacuum

Majamaa, T. / Airaksinen, V.-M. / Sinkkonen, J.

Fabrication of ultrathin silicon dioxide layers in ultra high vacuum

Majamaa, T. / Airaksinen, V.-M. / Sinkkonen, J.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Fabrication of ultrathin silicon dioxide layers in ultra high vacuum

Contributors:

Majamaa, T. (author) / Airaksinen, V.-M. (author) / Sinkkonen, J. (author)

Published in:

APPLIED SURFACE SCIENCE ; 107 ; 172-177

Publication date:

1996-01-01

Size:

6 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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