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Thermal chemical vapour deposition of copper films from copper ethylacetoacetate: microstructure and electrical resistivity
Thermal chemical vapour deposition of copper films from copper ethylacetoacetate: microstructure and electrical resistivity
Thermal chemical vapour deposition of copper films from copper ethylacetoacetate: microstructure and electrical resistivity
Devi, A. (author) / Shivashankar, S. A. (author)
JOURNAL OF MATERIALS SCIENCE LETTERS ; 17 ; 367-370
1998-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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