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Delamination of Thin Layers in H^+ Implanted Silicon Carbide
Delamination of Thin Layers in H^+ Implanted Silicon Carbide
Delamination of Thin Layers in H^+ Implanted Silicon Carbide
Hara, T. (Autor:in) / Kakizaki, Y. (Autor:in) / Tanaka, H. (Autor:in) / Inoue, M. (Autor:in) / Kajiyama, K. (Autor:in) / Yoneda, T. (Autor:in) / Sekine, K. (Autor:in) / Masao, K. (Autor:in)
MATERIALS SCIENCE FORUM ; 264/268 ; 771-774
01.01.1998
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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