Electrical Characterization of Defects Introduced During Plasma-based Processing of GaAs: Fid-Bau Portal

Electrical Characterization of Defects Introduced During Plasma-based Processing of GaAs

Auret, F. D. / Goodman, S. A. / Myburg, G. / Meyer, W. E. / Deenapanray, P. N. K. / Murtagh, M. / Ye, S.-R. / Masterson, H. J. / Beechinor, J. T. / Crean, G. M.

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Electrical Characterization of Defects Introduced During Plasma-based Processing of GaAs

Auret, F. D. / Goodman, S. A. / Myburg, G. / Meyer, W. E. / Deenapanray, P. N. K. / Murtagh, M. / Ye, S.-R. / Masterson, H. J. / Beechinor, J. T. / Crean, G. M.

Electrical Characterization of Defects Introduced During Plasma-based Processing of GaAs

Auret, F. D. / Goodman, S. A. / Myburg, G. / Meyer, W. E. / Deenapanray, P. N. K. / Murtagh, M. / Ye, S.-R. / Masterson, H. J. / Beechinor, J. T. / Crean, G. M.

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Title:

Electrical Characterization of Defects Introduced During Plasma-based Processing of GaAs

Contributors:

Auret, F. D. (author) / Goodman, S. A. (author) / Myburg, G. (author) / Meyer, W. E. (author) / Deenapanray, P. N. K. (author) / Murtagh, M. (author) / Ye, S.-R. (author) / Masterson, H. J. (author) / Beechinor, J. T. (author) / Crean, G. M. (author)

Published in:

MATERIALS SCIENCE FORUM ; 258/263 ; 1045-1050

Publication date:

1997-01-01

Size:

6 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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