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Electrical and structural characterization of defects introduced in p-SiGe during low energy erbium implantation

Mamor, M. / Pipeleers, B. / Auret, F. D. / Maes, J. / Hayne, M. / Moshchalkov, V. V. / Vantomme, A.

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Electrical and structural characterization of defects introduced in p-SiGe during low energy erbium implantation

Mamor, M. / Pipeleers, B. / Auret, F. D. / Maes, J. / Hayne, M. / Moshchalkov, V. V. / Vantomme, A.

Electrical and structural characterization of defects introduced in p-SiGe during low energy erbium implantation

Mamor, M. / Pipeleers, B. / Auret, F. D. / Maes, J. / Hayne, M. / Moshchalkov, V. V. / Vantomme, A.

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Check availability in my library

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Document information

Title:

Electrical and structural characterization of defects introduced in p-SiGe during low energy erbium implantation

Contributors:

Mamor, M. (author) / Pipeleers, B. (author) / Auret, F. D. (author) / Maes, J. (author) / Hayne, M. (author) / Moshchalkov, V. V. (author) / Vantomme, A. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 105 ; 179-183

Publication date:

2003-01-01

Size:

5 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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