Interfacial sub-oxide regions at Si-SiO~2 interfaces: minimization by post-oxidation rapid thermal anneal: Fid-Bau Portal

Interfacial sub-oxide regions at Si-SiO~2 interfaces: minimization by post-oxidation rapid thermal anneal

Lucovsky, G. / Koh, K. / Chaflin, B. / Hinds, B.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Interfacial sub-oxide regions at Si-SiO~2 interfaces: minimization by post-oxidation rapid thermal anneal

Lucovsky, G. / Koh, K. / Chaflin, B. / Hinds, B.

Interfacial sub-oxide regions at Si-SiO~2 interfaces: minimization by post-oxidation rapid thermal anneal

Lucovsky, G. / Koh, K. / Chaflin, B. / Hinds, B.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Interfacial sub-oxide regions at Si-SiO~2 interfaces: minimization by post-oxidation rapid thermal anneal

Contributors:

Lucovsky, G. (author) / Koh, K. (author) / Chaflin, B. (author) / Hinds, B. (author)

Published in:

APPLIED SURFACE SCIENCE ; 123/124 ; 490-495

Publication date:

1998-01-01

Size:

6 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

Yen, C.T. / Hung, C.C. / Mikhaylov, A. et al. | British Library Online Contents | 2014

Role of H~2 in Low Temperature Post-Oxidation Anneal for Gate Oxide on 6H-SiC

Raineri, V. / Lombardo, S. / Musumeci, P. et al. | British Library Online Contents | 2001

Development of the Novel Electron Bombardment Anneal System (EBAS) for SiC Post Ion Implantation Anneal

Shibagaki, M. / Kurematsu, Y. / Watanabe, F. et al. | British Library Online Contents | 2005

Investigation of sputtered indium-tin oxide/silicon interfaces: ion damage, hydrogen passivation and low-temperature anneal

Kuwano, K. / Ashok, S. | British Library Online Contents | 1997

Improved 4H-SiC MOS Interfaces Produced via Two Independent Processes: Metal Enhanced Oxidation and 1300^oC NO Anneal

Das, M. K. / Hull, B. A. / Krishnaswami, S. et al. | British Library Online Contents | 2006