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Thickness dependence of microstructural evolution of ZnO films deposited by rf magnetron sputtering
Thickness dependence of microstructural evolution of ZnO films deposited by rf magnetron sputtering
Thickness dependence of microstructural evolution of ZnO films deposited by rf magnetron sputtering
Yong Eui Lee (author) / Young Jin Kim (author) / Hyeong Joon Kim (author)
JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 13 ; 1260-1265
1998-01-01
6 pages
Article (Journal)
English
DDC:
620.11
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