Discrete �-Ta~2O~5 crystallite formation in reactively sputtered amorphous thin films: Fid-Bau Portal

Discrete -Ta~2O~5 crystallite formation in reactively sputtered amorphous thin films

Beckage, P. J. / Knorr, D. B. / Wu, X. M. / Lu, T.-M. / Rymaszewski, E. J.

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Discrete -Ta~2O~5 crystallite formation in reactively sputtered amorphous thin films

Beckage, P. J. / Knorr, D. B. / Wu, X. M. / Lu, T.-M. / Rymaszewski, E. J.

Discrete -Ta~2O~5 crystallite formation in reactively sputtered amorphous thin films

Beckage, P. J. / Knorr, D. B. / Wu, X. M. / Lu, T.-M. / Rymaszewski, E. J.

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Document information

Title:

Discrete -Ta~2O~5 crystallite formation in reactively sputtered amorphous thin films

Contributors:

Beckage, P. J. (author) / Knorr, D. B. (author) / Wu, X. M. (author) / Lu, T.-M. (author) / Rymaszewski, E. J. (author)

Published in:

JOURNAL OF MATERIALS SCIENCE ; 33 ; 4375-4379

Publication date:

1998-01-01

Size:

5 pages

ISSN:

0022-2461

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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