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    Modifications of He implantation induced cavities in silicon by MeV silicon implantation

    New search for: Desgardin, P.
    New search for: Barthe, M. F.
    New search for: Ntsoenzok, E.
    New search for: Liu, C. L.

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    Modifications of He implantation induced cavities in silicon by MeV silicon implantation

    New search for: Desgardin, P.
    New search for: Barthe, M. F.
    New search for: Ntsoenzok, E.
    New search for: Liu, C. L.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Modifications of He implantation induced cavities in silicon by MeV silicon implantation

    New search for: Desgardin, P.
    New search for: Barthe, M. F.
    New search for: Ntsoenzok, E.
    New search for: Liu, C. L.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Modifications of He implantation induced cavities in silicon by MeV silicon implantation

    Contributors:

    Desgardin, P. (author) / Barthe, M. F. (author) / Ntsoenzok, E. (author) / Liu, C. L. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 252 ; 3231-3236

    Publication date:

    2006-01-01

    Size:

    6 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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