Helium desorption from cavities induced by high energy 3He and 4He implantation in silicon

Godey, S. / Ntsoenzok, E. / Sauvage, T. et al. | British Library Online Contents | 2000

Gettering of platinum by cavities induced in silicon by high energy implantation of HE ions

Mariani-Regula, G. / Pichaud, B. / Godey, S. et al. | British Library Online Contents | 2000

Helium implantation in silicon: the effects of implantation temperature

Oliviero, E. / David, M. L. / Fedorov, A. V. et al. | British Library Online Contents | 2003

Beryllium Implantation Doping of Silicon Carbide

Henkel, T. / Tanaka, Y. / Kobayashi, N. et al. | British Library Online Contents | 2000

Modification of silicon waveguide structures using ion implantation induced defects

Knights, A. P. / Dudeck, K. J. / Walters, W. D. et al. | British Library Online Contents | 2008