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Modifications of He implantation induced cavities in silicon by MeV silicon implantation
Modifications of He implantation induced cavities in silicon by MeV silicon implantation
Modifications of He implantation induced cavities in silicon by MeV silicon implantation
Desgardin, P. (author) / Barthe, M. F. (author) / Ntsoenzok, E. (author) / Liu, C. L. (author)
APPLIED SURFACE SCIENCE ; 252 ; 3231-3236
2006-01-01
6 pages
Article (Journal)
English
DDC:
621.35
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