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    Oxygen-related defects in the top silicon layer of SIMOX; the effect of thermal treatments

    New search for: Rivera, A.
    New search for: de Nijs, J. M.
    New search for: Balk, P.
    New search for: van Veen, A.
    New search for: Schut, H.
    New search for: Alkemade, P. F.

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    Oxygen-related defects in the top silicon layer of SIMOX; the effect of thermal treatments

    New search for: Rivera, A.
    New search for: de Nijs, J. M.
    New search for: Balk, P.
    New search for: van Veen, A.
    New search for: Schut, H.
    New search for: Alkemade, P. F.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Oxygen-related defects in the top silicon layer of SIMOX; the effect of thermal treatments

    New search for: Rivera, A.
    New search for: de Nijs, J. M.
    New search for: Balk, P.
    New search for: van Veen, A.
    New search for: Schut, H.
    New search for: Alkemade, P. F.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Oxygen-related defects in the top silicon layer of SIMOX; the effect of thermal treatments

    Contributors:

    Rivera, A. (author) / de Nijs, J. M. (author) / Balk, P. (author) / van Veen, A. (author) / Schut, H. (author) / Alkemade, P. F. (author)

    Published in:

    MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 73 ; 77 - 81

    Publication date:

    2000-01-01

    Size:

    5 pages

    ISSN:

    0921-5107

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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