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    Relationship between Donor Activation and Defect Annealing in 6H-SiC Hot-Implanted with Phosphorus Ions

    New search for: Ohshima, T.
    New search for: Uedono, A.
    New search for: Itoh, H.
    New search for: Yoshikawa, M.
    New search for: Kojima, K.
    New search for: Okada, S.
    New search for: Nashiyama, I.
    New search for: Abe, K.
    New search for: Tanigawa, S.
    New search for: Frank, T.

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    Relationship between Donor Activation and Defect Annealing in 6H-SiC Hot-Implanted with Phosphorus Ions

    New search for: Ohshima, T.
    New search for: Uedono, A.
    New search for: Itoh, H.
    New search for: Yoshikawa, M.
    New search for: Kojima, K.
    New search for: Okada, S.
    New search for: Nashiyama, I.
    New search for: Abe, K.
    New search for: Tanigawa, S.
    New search for: Frank, T.

    Access

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    Check availability in my library
    Order at Subito €

    Relationship between Donor Activation and Defect Annealing in 6H-SiC Hot-Implanted with Phosphorus Ions

    New search for: Ohshima, T.
    New search for: Uedono, A.
    New search for: Itoh, H.
    New search for: Yoshikawa, M.
    New search for: Kojima, K.
    New search for: Okada, S.
    New search for: Nashiyama, I.
    New search for: Abe, K.
    New search for: Tanigawa, S.
    New search for: Frank, T.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Document information
    Title:

    Relationship between Donor Activation and Defect Annealing in 6H-SiC Hot-Implanted with Phosphorus Ions

    Contributors:

    Ohshima, T. (author) / Uedono, A. (author) / Itoh, H. (author) / Yoshikawa, M. (author) / Kojima, K. (author) / Okada, S. (author) / Nashiyama, I. (author) / Abe, K. (author) / Tanigawa, S. (author) / Frank, T. (author)

    Published in:

    MATERIALS SCIENCE FORUM ; 338/342 ; 857-860

    Publication date:

    2000-01-01

    Size:

    4 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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