Growth of 3C-SiC on Si(100) by LPCVD and Patterning of the Grown Layers: Fid-Bau Portal

Growth of 3C-SiC on Si(100) by LPCVD and Patterning of the Grown Layers

Bakin, A. / Behrens, I. / Ivanov, A. / Peiner, E. / Piester, D. / Wehmann, H.-H. / Schlachetzki, A.

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Growth of 3C-SiC on Si(100) by LPCVD and Patterning of the Grown Layers

Bakin, A. / Behrens, I. / Ivanov, A. / Peiner, E. / Piester, D. / Wehmann, H.-H. / Schlachetzki, A.

Growth of 3C-SiC on Si(100) by LPCVD and Patterning of the Grown Layers

Bakin, A. / Behrens, I. / Ivanov, A. / Peiner, E. / Piester, D. / Wehmann, H.-H. / Schlachetzki, A.

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Title:

Growth of 3C-SiC on Si(100) by LPCVD and Patterning of the Grown Layers

Contributors:

Bakin, A. (author) / Behrens, I. (author) / Ivanov, A. (author) / Peiner, E. (author) / Piester, D. (author) / Wehmann, H.-H. (author) / Schlachetzki, A. (author)

Published in:

MATERIALS SCIENCE FORUM ; 389/393 ; 327-330

Publication date:

2002-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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