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Oxide precipitates in annealed nitrogen-doped 300mm CZ-SI

Akhmetov, V. D. / Richter, H. / Lysytskiy, O. / Wahlich, R. / Muller, T.

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Oxide precipitates in annealed nitrogen-doped 300mm CZ-SI

Akhmetov, V. D. / Richter, H. / Lysytskiy, O. / Wahlich, R. / Muller, T.

Oxide precipitates in annealed nitrogen-doped 300mm CZ-SI

Akhmetov, V. D. / Richter, H. / Lysytskiy, O. / Wahlich, R. / Muller, T.

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Check availability in my library

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Document information

Title:

Oxide precipitates in annealed nitrogen-doped 300mm CZ-SI

Contributors:

Akhmetov, V. D. (author) / Richter, H. (author) / Lysytskiy, O. (author) / Wahlich, R. (author) / Muller, T. (author)

Published in:

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 5 ; 391-396

Publication date:

2002-01-01

Size:

6 pages

ISSN:

1369-8001

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.38152

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