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Oxide precipitates in annealed nitrogen-doped 300mm CZ-SI
Oxide precipitates in annealed nitrogen-doped 300mm CZ-SI
Oxide precipitates in annealed nitrogen-doped 300mm CZ-SI
Akhmetov, V. D. (author) / Richter, H. (author) / Lysytskiy, O. (author) / Wahlich, R. (author) / Muller, T. (author)
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 5 ; 391-396
2002-01-01
6 pages
Article (Journal)
English
DDC:
621.38152
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