Large Area SiC Epitaxial Layer Growth in a Warm-Wall Planetary VPE Reactor: Fid-Bau Portal

Large Area SiC Epitaxial Layer Growth in a Warm-Wall Planetary VPE Reactor

Burk, A. A. / O Loughlin, M. J. / Paisley, M. J. / Powell, A. R. / Brady, M. F. / Leonard, R. T. / Muller, S. G. / Allen, S. T.

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Large Area SiC Epitaxial Layer Growth in a Warm-Wall Planetary VPE Reactor

Burk, A. A. / O Loughlin, M. J. / Paisley, M. J. / Powell, A. R. / Brady, M. F. / Leonard, R. T. / Muller, S. G. / Allen, S. T.

Large Area SiC Epitaxial Layer Growth in a Warm-Wall Planetary VPE Reactor

Burk, A. A. / O Loughlin, M. J. / Paisley, M. J. / Powell, A. R. / Brady, M. F. / Leonard, R. T. / Muller, S. G. / Allen, S. T.

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Title:

Large Area SiC Epitaxial Layer Growth in a Warm-Wall Planetary VPE Reactor

Contributors:

Burk, A. A. (author) / O Loughlin, M. J. (author) / Paisley, M. J. (author) / Powell, A. R. (author) / Brady, M. F. (author) / Leonard, R. T. (author) / Muller, S. G. (author) / Allen, S. T. (author) / Nipoti, R. / Poggi, A.

Published in:

Silicon Carbide and Related Materials 2004 ; 137-140

MATERIALS SCIENCE FORUM ; 483/485

Publication date:

2005-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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