Gettering Effect with Al Implanted into 4H-SiC CVD Epitaxial Layers: Fid-Bau Portal

Gettering Effect with Al Implanted into 4H-SiC CVD Epitaxial Layers

Kalinina, E. / Kholujanov, G. / Sitnikova, A. / Kossov, V. / Yafaev, R. / Pensl, G. / Reshanov, S. / Hallen, A. / Konstantinov, A.

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Gettering Effect with Al Implanted into 4H-SiC CVD Epitaxial Layers

Kalinina, E. / Kholujanov, G. / Sitnikova, A. / Kossov, V. / Yafaev, R. / Pensl, G. / Reshanov, S. / Hallen, A. / Konstantinov, A.

Gettering Effect with Al Implanted into 4H-SiC CVD Epitaxial Layers

Kalinina, E. / Kholujanov, G. / Sitnikova, A. / Kossov, V. / Yafaev, R. / Pensl, G. / Reshanov, S. / Hallen, A. / Konstantinov, A.

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Title:

Gettering Effect with Al Implanted into 4H-SiC CVD Epitaxial Layers

Contributors:

Kalinina, E. (author) / Kholujanov, G. (author) / Sitnikova, A. (author) / Kossov, V. (author) / Yafaev, R. (author) / Pensl, G. (author) / Reshanov, S. (author) / Hallen, A. (author) / Konstantinov, A. (author) / Bergman, P.

Published in:

Silicon Carbide and Related Materials 2002 ; 637-640

MATERIALS SCIENCE FORUM ; 433/436

Publication date:

2003-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Mohapatra, S. / Mahapatra, D. P. | British Library Online Contents | 2006

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Gettering efficiencies of polysilicon-, stacking fault- and He-implanted backsides for Cu and Ni

Hoelzl, R. / Range, K. J. / Fabry, L. et al. | British Library Online Contents | 2000

SEM Visibility of Stacking Faults in 4H-Silicon Carbide Epitaxial and Implanted Layers

Zimmermann, U. / Osterman, J. / Galeckas, A. et al. | British Library Online Contents | 2003

Improvement of the Thermal Conductivity in 4H-SiC Epitaxial Layer by Introducing Gettering Sites

Ottaviani, L. / Kazan, M. / Masri, P.M. et al. | British Library Online Contents | 2009