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Slow Positron Beam Investigations of Defects Caused by B^+ Implantation into Epitaxial 6H-SiC
Slow Positron Beam Investigations of Defects Caused by B^+ Implantation into Epitaxial 6H-SiC
Slow Positron Beam Investigations of Defects Caused by B^+ Implantation into Epitaxial 6H-SiC
Anwand, W. (author) / Brauer, G. (author) / Kuriplach, J. (author) / Skorupa, W. (author)
MATERIALS SCIENCE FORUM ; 445/446 ; 36-38
2004-01-01
3 pages
Article (Journal)
English
DDC:
620.11
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