Fachinformationsdienst BAUdigital

A platform for research: civil engineering, architecture and urbanism

    Numerical simulation of nanoparticle-generating electronegative plasmas in the PECVD of nanostructured silicon film

    New search for: Denysenko, I.
    New search for: Ostrikov, K.
    New search for: Rutkevych, P. P.
    New search for: Xu, S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Numerical simulation of nanoparticle-generating electronegative plasmas in the PECVD of nanostructured silicon film

    New search for: Denysenko, I.
    New search for: Ostrikov, K.
    New search for: Rutkevych, P. P.
    New search for: Xu, S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Numerical simulation of nanoparticle-generating electronegative plasmas in the PECVD of nanostructured silicon film

    New search for: Denysenko, I.
    New search for: Ostrikov, K.
    New search for: Rutkevych, P. P.
    New search for: Xu, S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Numerical simulation of nanoparticle-generating electronegative plasmas in the PECVD of nanostructured silicon film

    Contributors:

    Denysenko, I. (author) / Ostrikov, K. (author) / Rutkevych, P. P. (author) / Xu, S. (author)

    Published in:

    COMPUTATIONAL MATERIALS SCIENCE. ; 30 ; 303-307

    Publication date:

    2004-01-01

    Size:

    5 pages

    ISSN:

    0927-0256

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.1 / 510

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

    Similar titles

    Thermal ionization and electronegative species

    Fuhs, A.E. | Engineering Index Backfile | 1964

    Crystallization Mechanism of Si Film by PECVD

    Bai, X.-y. / Guo, Q.-c. / Liu, Q. et al. | British Library Online Contents | 2013

    PECVD of Silicon Dioxide from TEOS/Oxygen Mixtures

    Cale, T. S. / Raupp, G. B. | British Library Online Contents | 1993

    Neural network modeling of PECVD silicon nitride films

    Ghosh, S. / Dutta, P.K. / Bose, D.N. | British Library Online Contents | 1999

    Fabrication of PECVD-silicon oxynitride-based optical waveguides

    Alayo, M. I. / Criado, D. / Carreno, M. N. et al. | British Library Online Contents | 2004

    Back to top