Depth profiles of boron and nitrogen in SiON films by backside SIMS: Fid-Bau Portal

Depth profiles of boron and nitrogen in SiON films by backside SIMS

Sameshima, J. / Maeda, R. / Yamada, K. / Karen, A. / Yamada, S.

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Depth profiles of boron and nitrogen in SiON films by backside SIMS

Sameshima, J. / Maeda, R. / Yamada, K. / Karen, A. / Yamada, S.

Depth profiles of boron and nitrogen in SiON films by backside SIMS

Sameshima, J. / Maeda, R. / Yamada, K. / Karen, A. / Yamada, S.

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Check availability in my library

Order at Subito €

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Document information

Title:

Depth profiles of boron and nitrogen in SiON films by backside SIMS

Contributors:

Sameshima, J. (author) / Maeda, R. (author) / Yamada, K. (author) / Karen, A. (author) / Yamada, S. (author)

Published in:

APPLIED SURFACE SCIENCE ; 231/232 ; 614-617

Publication date:

2004-01-01

Size:

4 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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