Annealing of a Vacancy-Type Defect and Diffusion of Implanted Boron in 6H-SiC

Ohshima, T. / Uedono, A. / Eryu, O. et al. | British Library Online Contents | 2003

Diffusion of ion-implanted boron impurities into pre-amorphized silicon

Ohno, N. / Hara, T. / Matsunaga, Y. et al. | British Library Online Contents | 2000

An investigation on the modeling of boron-enhanced diffusion of ultralow energy implanted boron in silicon

Marcon, J. / Ihaddadene-Le Coq, L. / Masmoudi, K. et al. | British Library Online Contents | 2005

Diffusion models of BF2+ and B+ implanted at low-energy in crystalline silicon

Marcon, J. / Coq, L. I. / Masmoudi, K. et al. | British Library Online Contents | 2004

Suppression of boron transient enhanced diffusion in silicon and silicon germanium by fluorine implantation

El Mubarek, H. A. / Wang, Y. / Price, R. et al. | British Library Online Contents | 2005