Atomic transport properties and electrical activation of ultra-low energy implanted boron in crystalline silicon: Fid-Bau Portal

Atomic transport properties and electrical activation of ultra-low energy implanted boron in crystalline silicon

Privitera, V. / Napolitani, E. / Priolo, F. / Moffatt, S. / La Magna, A. / Mannino, G. / Carnera, A. / Picariello, A.

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Atomic transport properties and electrical activation of ultra-low energy implanted boron in crystalline silicon

Privitera, V. / Napolitani, E. / Priolo, F. / Moffatt, S. / La Magna, A. / Mannino, G. / Carnera, A. / Picariello, A.

Atomic transport properties and electrical activation of ultra-low energy implanted boron in crystalline silicon

Privitera, V. / Napolitani, E. / Priolo, F. / Moffatt, S. / La Magna, A. / Mannino, G. / Carnera, A. / Picariello, A.

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Title:

Atomic transport properties and electrical activation of ultra-low energy implanted boron in crystalline silicon

Contributors:

Privitera, V. (author) / Napolitani, E. (author) / Priolo, F. (author) / Moffatt, S. (author) / La Magna, A. (author) / Mannino, G. (author) / Carnera, A. (author) / Picariello, A. (author)

Published in:

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 2 ; 35-44

Publication date:

1999-01-01

Size:

10 pages

ISSN:

1369-8001

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.38152

Schroer, E. / Privitera, V. / Priolo, F. et al. | British Library Online Contents | 2000

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Marcon, J. / Merabet, A. | British Library Online Contents | 2008

Effect of flash lamp annealing on electrical activation in boron-implanted polycrystalline Si thin films

Do, W. / Jin, W. B. / Choi, J. et al. | British Library Online Contents | 2014