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    Reduction of Fluoride Species and Surface Roughness by H~2 Gas Addition in SiC Dry Etching

    New search for: Mikami, H.
    New search for: Horie, Y.
    New search for: Hatayama, T.
    New search for: Yano, H.
    New search for: Uraoka, Y.
    New search for: Fuyuki, T.
    New search for: Nipoti, R.
    New search for: Poggi, A.
    New search for: Scorzoni, A.

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    Reduction of Fluoride Species and Surface Roughness by H~2 Gas Addition in SiC Dry Etching

    New search for: Mikami, H.
    New search for: Horie, Y.
    New search for: Hatayama, T.
    New search for: Yano, H.
    New search for: Uraoka, Y.
    New search for: Fuyuki, T.
    New search for: Nipoti, R.
    New search for: Poggi, A.
    New search for: Scorzoni, A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Reduction of Fluoride Species and Surface Roughness by H~2 Gas Addition in SiC Dry Etching

    New search for: Mikami, H.
    New search for: Horie, Y.
    New search for: Hatayama, T.
    New search for: Yano, H.
    New search for: Uraoka, Y.
    New search for: Fuyuki, T.
    New search for: Nipoti, R.
    New search for: Poggi, A.
    New search for: Scorzoni, A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
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    Document information
    Title:

    Reduction of Fluoride Species and Surface Roughness by H~2 Gas Addition in SiC Dry Etching

    Contributors:

    Mikami, H. (author) / Horie, Y. (author) / Hatayama, T. (author) / Yano, H. (author) / Uraoka, Y. (author) / Fuyuki, T. (author) / Nipoti, R. / Poggi, A. / Scorzoni, A.

    Published in:

    Silicon Carbide and Related Materials 2004 ; 757-760

    MATERIALS SCIENCE FORUM ; 483/485

    Publication date:

    2005-01-01

    Size:

    4 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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