Pressure controlled surface roughness of SiC plasma etching

Kim, B. / Lee, B.-T. | British Library Online Contents | 2004

Radio frequency bias power effect on surface roughness of silicon carbide plasma etching

Kim, B. / Kim, K. / Lee, B. T. | British Library Online Contents | 2003

Reactive Ion Etching Induced Surface Damage of Silicon Carbide

Xia, J. H. / Rusli / Gopalakrishan, R. et al. | British Library Online Contents | 2005

Reduction of Surface Roughness of 4H-SiC by Catalyst-Referred Etching

Okamoto, T. / Sano, Y. / Hara, H. et al. | British Library Online Contents | 2010

Assessment of interface roughness during plasma etching through the use of real-time ellipsometry

Han, C. Y. / Lai, C. W. / Chao, Y. F. et al. | British Library Online Contents | 2011