A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
Reduction of Surface Roughness of 4H-SiC by Catalyst-Referred Etching
Reduction of Surface Roughness of 4H-SiC by Catalyst-Referred Etching
Reduction of Surface Roughness of 4H-SiC by Catalyst-Referred Etching
Okamoto, T. (author) / Sano, Y. (author) / Hara, H. (author) / Hatayama, T. (author) / Arima, K. (author) / Yagi, K. (author) / Murata, J. (author) / Sadakuni, S. (author) / Tachibana, K. (author) / Shirasawa, Y. (author)
2010-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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