Anomalous characteristics of platelet defects formed by zero angle tilt hydrogen implantation in silicon wafers

Xiao, Q. / Tu, H. | British Library Online Contents | 2005

Strain relaxation of Ge-implanted silicon wafers

Xiao, Q. / Tu, H. / Zhou, Q. et al. | British Library Online Contents | 2006

Effect of thermal annealing on the microstructure of ytterbium-implanted silicon wafers

Yang, Y. / Chen, H. / Zhou, Y. Q. et al. | British Library Online Contents | 1997

Thermal Evolution of Defects in H-Implanted Silicon Investigated by Slow Positrons

Brusa, R. S. / Zecca, A. / Meng, X. T. et al. | British Library Online Contents | 1995

Interface Defects of Bonded Silicon Wafers

Reiche, M. / Tong, Q.-Y. / Goesele, U. et al. | British Library Online Contents | 1995