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Thin strain-relaxed SiGe grown by ultrahigh vacuum chemical vapor deposition

Xu, X. / Kweh, H. / Zhang, Z. / Liu, Z. / Zhou, W. / Zhang, W. / Qian, P.

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Thin strain-relaxed SiGe grown by ultrahigh vacuum chemical vapor deposition

Xu, X. / Kweh, H. / Zhang, Z. / Liu, Z. / Zhou, W. / Zhang, W. / Qian, P.

Thin strain-relaxed SiGe grown by ultrahigh vacuum chemical vapor deposition

Xu, X. / Kweh, H. / Zhang, Z. / Liu, Z. / Zhou, W. / Zhang, W. / Qian, P.

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Check availability in my library

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Document information

Title:

Thin strain-relaxed SiGe grown by ultrahigh vacuum chemical vapor deposition

Contributors:

Xu, X. (author) / Kweh, H. (author) / Zhang, Z. (author) / Liu, Z. (author) / Zhou, W. (author) / Zhang, W. (author) / Qian, P. (author)

Published in:

APPLIED SURFACE SCIENCE ; 252 ; 7594-7598

Publication date:

2006-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

Chang, T.-C. / Yeh, W.-K. / Chang, C.-Y. et al. | British Library Online Contents | 1996

High Quality SiGe Layer Deposited by a New Ultrahigh Vacuum Chemical Vapor Deposition System

LUO, G. / LIN, X. / CHEN, P. et al. | British Library Online Contents | 2000

Defect imaging of SiGe strain relaxed buffers grown by LEPECVD

Marchionna, S. / Virtuani, A. / Acciarri, M. et al. | British Library Online Contents | 2006

Interfacial study of Si-Ge multilayers grown using ultrahigh-vacuum chemical vapor deposition

Lian, D. / Wen, H.-C. | British Library Online Contents | 2013

Wafer bonding involving strain-relaxed SiGe

Radu, I. / Singh, R. / Reiche, M. et al. | British Library Online Contents | 2005