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Novel approaches to improve laser annealed SOI-MOSFETs

Herrmann, T. / Feudel, T. / Horstmann, M. / Hoentschel, J. / Herrmann, L. / Herden, M. / Klix, W. / Stenzel, R.

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Novel approaches to improve laser annealed SOI-MOSFETs

Herrmann, T. / Feudel, T. / Horstmann, M. / Hoentschel, J. / Herrmann, L. / Herden, M. / Klix, W. / Stenzel, R.

Novel approaches to improve laser annealed SOI-MOSFETs

Herrmann, T. / Feudel, T. / Horstmann, M. / Hoentschel, J. / Herrmann, L. / Herden, M. / Klix, W. / Stenzel, R.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Novel approaches to improve laser annealed SOI-MOSFETs

Contributors:

Herrmann, T. (author) / Feudel, T. (author) / Horstmann, M. (author) / Hoentschel, J. (author) / Herrmann, L. (author) / Herden, M. (author) / Klix, W. (author) / Stenzel, R. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 124-125 ; 223-227

Publication date:

2005-01-01

Size:

5 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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