Boron interaction with extended defects induced by He-H co-implantation in Si: Fid-Bau Portal

Boron interaction with extended defects induced by He-H co-implantation in Si

Gaudin, G. / Cayrel, F. / Bongiorno, C. / Jerisian, R. / Dubois, C. / Raineri, V. / Alquier, D.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Boron interaction with extended defects induced by He-H co-implantation in Si

Gaudin, G. / Cayrel, F. / Bongiorno, C. / Jerisian, R. / Dubois, C. / Raineri, V. / Alquier, D.

Boron interaction with extended defects induced by He-H co-implantation in Si

Gaudin, G. / Cayrel, F. / Bongiorno, C. / Jerisian, R. / Dubois, C. / Raineri, V. / Alquier, D.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Boron interaction with extended defects induced by He-H co-implantation in Si

Contributors:

Gaudin, G. (author) / Cayrel, F. (author) / Bongiorno, C. (author) / Jerisian, R. (author) / Dubois, C. (author) / Raineri, V. (author) / Alquier, D. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 124-125 ; 266-270

Publication date:

2005-01-01

Size:

5 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Cayrel, F. / Alquier, D. / Dubois, C. et al. | British Library Online Contents | 2005

Formation of Extended Defects in 4H-SiC Induced by Ion Implantation/Annealing

Nagano, M. / Tsuchida, H. / Suzuki, T. et al. | British Library Online Contents | 2009

Effects of Si~3N~4 Films on Diffusion of Boron and Extended Defects in Silicon During Post-Implantation Annealing

Zaitsu, Y. / Osada, K. / Shimizu, T. et al. | British Library Online Contents | 1995

Isochronal annealing study of hydrogen interaction with implantation-induced point defects in p-type silicon

Tokuda, Y. / Sato, H. | British Library Online Contents | 2003

Ion implantation induced defects in epitaxial 4H-SiC

Hallen, A. / Henry, A. / Pellegrino, P. et al. | British Library Online Contents | 1999