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    The Characteristic of Abrasive Particle in Chemical - Mechanical Polishing

    New search for: Tsai, H. J.
    New search for: Chang, C. C.
    New search for: Jeng, Y. R.
    New search for: Chen, S. L.
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    The Characteristic of Abrasive Particle in Chemical - Mechanical Polishing

    New search for: Tsai, H. J.
    New search for: Chang, C. C.
    New search for: Jeng, Y. R.
    New search for: Chen, S. L.
    New search for: Jywe, W.
    New search for: Chen, C.-L.
    New search for: Fan, K.-C.
    New search for: Fung, R. F.
    New search for: Hanson, S. G.
    New search for: Hsieh, W.-H.
    New search for: Hsu, C.-L.
    New search for: Huang, Y.-M.
    New search for: Hwang, Y.-L.
    New search for: Jager, G.
    New search for: Jeng, Y. R.
    New search for: Li, W.
    New search for: Liao, Y.-S.
    New search for: Lin, C.-C.
    New search for: Lin, Z.-C.
    New search for: Sung, C.-K.
    New search for: Tzeng, C.-H.

    Access

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    Order at Subito €

    The Characteristic of Abrasive Particle in Chemical - Mechanical Polishing

    New search for: Tsai, H. J.
    New search for: Chang, C. C.
    New search for: Jeng, Y. R.
    New search for: Chen, S. L.
    New search for: Jywe, W.
    New search for: Chen, C.-L.
    New search for: Fan, K.-C.
    New search for: Fung, R. F.
    New search for: Hanson, S. G.
    New search for: Hsieh, W.-H.
    New search for: Hsu, C.-L.
    New search for: Huang, Y.-M.
    New search for: Hwang, Y.-L.
    New search for: Jager, G.
    New search for: Jeng, Y. R.
    New search for: Li, W.
    New search for: Liao, Y.-S.
    New search for: Lin, C.-C.
    New search for: Lin, Z.-C.
    New search for: Sung, C.-K.
    New search for: Tzeng, C.-H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Document information
    Title:

    The Characteristic of Abrasive Particle in Chemical - Mechanical Polishing

    Contributors:

    Tsai, H. J. (author) / Chang, C. C. (author) / Jeng, Y. R. (author) / Chen, S. L. (author) / Jywe, W. / Chen, C.-L. / Fan, K.-C. / Fung, R. F. / Hanson, S. G. / Hsieh, W.-H.

    Published in:

    Progress on Advanced Manufacture for Micro/Nano Technology 2005: PART 2 Proceedings of the 2005 International Conference on Advanced Manufacture Taipei, Taiwan, R.O.C. November 28^t^h - December 2^n^d, 2005 ; 805-810

    MATERIALS SCIENCE FORUM ; 505/507

    Publication date:

    2006-01-01

    Size:

    6 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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